Clean Rooms Types and Terms

Clean Room Types

• Ballrooms are large-scale cleanrooms.
  
• Cleanroom design refers to the type of design, including conventional, portable, hardwall modular, and softwall modular.
  
• Cleanroom supplies include products that aid in maintaining a sterile cleanroom.
  
• Cleanrooms are areas where air content is strictly controlled.
• Conventional cleanrooms are generally permanent cleanrooms and are the most common type.
  
• Laminar flow cleanrooms have filtration systems that control airflow and velocity to keep airborne particles from coming into contact with anything.
  
• Micro environments are clean areas constructed around the wafer itself or around a part of the wafer to protect it from atmospheric exposure.
  
• Mini environments are localized clean areas constructed around a specific tool or part to protect the wafer from atmospheric exposure.
  
• Modular cleanrooms are cleanrooms that are assembled on-site from pre-cut components (e.g. ceiling grid struts, walls, etc.).
  
• Portable clean rooms are transportable and self-contained.
  
• Softwall cleanrooms have walls constructed either of fabric stretched tightly over a frame or of free-hanging strips of fabric.

Clean Room Terms

Air Lock - A room located between a cleanroom and outside area that acts as a buffer during the transportation of materials into and out of the clean room.

Air Shower - A small room in which high-speed air jets rid personnel of contaminants prior to entering the clean room.
 
Airborne Particulate Cleanliness Class Number - Represents the number of particles 0.5 microns in size or larger per cubic foot of air in the clean room. The smaller the class number, the higher the air purity.
 
Ceiling Grid System - Structure that secures lights and filters into the ceiling.
 
Cleanroom Partitions - Walls that create multiple clean areas to meet a variety of cleanliness requirements inside a single cleanroom.
 
Clean Room Pass Thrus - Air locks that provide a way for products and supplies to be delivered and picked up without personnel having to enter the room, minimizing the entry of contaminating agents.
 
Clean Room Suits - Also called "bunny suits," they are worn over regular clothing and made from a special non-linting, anti-static fabric.
 
Clean Room Tables - Tables that come with either a perforated or solid top and meet cleanroom requirements.
 
Contamination - Harmful or unnecessary substances that decrease the purity of the environment in which they are found.
 
Electrostatic Discharge (ESD) - An uncontrolled dissipation of electricity, also called a "shock," which can easily destroy semiconductor products.
 
Equipment Layout - A summary of the cleanroom and other functional areas, which articulates the areas necessary for functioning and support.
 
Federal Standard 209E - Text that dictates air cleanliness standards in clean rooms.
 
Filter Module - Unit containing either HEPA or ULPA filter located in clean room ceilings or walls.

HEPA (High Efficiency Particulate Air) Filter - Air filter capable of trapping a minimum of 99.97% of particles at least 0.3 microns in size.
 
HVAC (Heating, Ventilation and Air Conditioning) Systems - The equipment responsible for providing and maintaining heating, cooling and air conditioning to a building or facility.
 
Laminar Flow - Airflow within a confined area traveling with consistent speed and direction.
 
Micron - Measurement unit equivalent to one-millionth of a meter.
 
Microbes - Microscopic, living organisms usually carrying a disease. They are often released from human skin during skin cell shedding.  
 
Particle Size - Represents the measurement or dimensions of a particle.
 
Particle - An object, either solid or liquid, ranging from 0.001 to 1,000 microns.
 
Particulate - A body of matter consisting of distinct particles.
 
Prefilters - Additional filter used in conjunction with the main filter to collect large particles and protect the main filter from excess contamination.
 
Sealant - Substance often consisting of plastic or silicone used to secure HEPA filters into ceiling grids.

Sticky Mat - Doormat located at clean room and shower entrances that utilizes adhesive film to clean the shoes of personnel.
 
Testing/Certification Services - Services responsible for the testing and maintenance of cleanroom components, including HEPA filters, HVAC systems and other equipment. Tests on HEPA filters include particle count surveys, air condition measurement, vibration measurement and airflow consistency.
 
Turbulent Flow - Airflow within an enclosure that does not travel in one direction.
 
ULPA (Ultra Low Particulate Air) Filter - Air filter capable of trapping 99.9999% of particles at least 0.12 microns in size.
 
Utility Matrix - Also called "process utility summary," "tool matrix" or "utility requirement spreadsheet," it is the summary of the analysis of the services of each piece of equipment needed to plan the construction of a cleanroom.
 
Wafer - Also called a "slice," it is a very thin piece of silicon that is the base material for microchips.